Specs Confocal Displacement Sensor CL-3000 series

Model

CL-L007G^*1

CL-L015G^*1

CL-L030G^*1

CL-L070G^*1

CL-L150G^*1

Image

Type

Optical unit

Head

CL-L007 ^*1

CL-L015 ^*1

CL-L030 ^*1

CL-L070 ^*1

CL-L150 ^*1

Reference distance

7 mm

15 mm

30 mm

70 mm

150 mm

Reference measurement range

Measurement range

± 1.5 mm

± 1.3 mm

± 3.7 mm

± 10 mm

± 35 mm

Linearity

± 1.95 µm ^*2

± 0.36 µm ^*2

± 0.81 µm^*2

± 2.0 µm^*2

± 5.5 µm^*2

High precision measurement range

Measurement range

± 0.5 mm

± 1.0 mm

± 3.0 mm

± 15 mm

Linearity

± 0.78 µm ^*2

± 0.28 µm ^*2

± 0.59 µm ^*2

± 1.9 µm ^*2

± 4.5 µm ^*2

Resolution

0.015 µm^*3

0.003 µm^*3

0.015 µm^*3

0.025 µm^*3

0.1 µm^*3

Spot diameter

ø 750 µm

ø 300 µm

ø 500 µm

ø 600 µm

ø 1000 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 380 g

Optical unit

Approx. 1600 g

Model

CL-P007G^*1

CL-P015G^*1

CL-P030G^*1

CL-P070G^*1

CL-P150G^*1

Image

Type

Optical unit

Head

CL-P007 ^*1

CL-P015 ^*1

CL-P030 ^*1

CL-P070 ^*1

CL-P150 ^*1

Reference distance

7 mm

15 mm

30 mm

70 mm

150 mm

Reference measurement range

Measurement range

± 1.5 mm

± 1.3 mm

± 3.7 mm

± 10 mm

± 35 mm

Linearity

± 0.83 µm ^*2

± 0.36 µm ^*2

± 0.81 µm ^*2

± 2.0 µm ^*2

± 5.5 µm ^*2

High precision measurement range

Measurement range

± 0.5 mm

± 1.0 mm

± 3.0 mm

± 15 mm

Linearity

± 0.43 µm ^*2

± 0.28 µm ^*2

± 0.59 µm ^*2

± 1.9 µm ^*2

± 4.5 µm ^*2

Resolution

0.015 µm

0.003 µm

0.015 µm

0.025 µm

0.1 µm

Spot diameter

ø 50 µm

ø 25 µm

ø 38 µm

ø 50 µm

ø 75 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 380 g

Optical unit

Approx. 1600 g

Model

CL-L007N^*1

CL-L015N^*1

CL-L030N^*1

CL-L070N^*1

CL-L150N^*1

Image

Type

Optical unit

Head

CL-L007 ^*1

CL-L015 ^*1

CL-L030 ^*1

CL-L070 ^*1

CL-L150 ^*1

Reference distance

7 mm

15 mm

30 mm

70 mm

150 mm

Reference measurement range

Measurement range

± 1.5 mm

± 1.3 mm

± 3.7 mm

± 10 mm

± 35 mm

Linearity

± 2.1 µm ^*2

± 0.49 µm ^*2

± 0.94 µm^*2

± 2.2 µm^*2

± 5.65 µm^*2

High precision measurement range

Measurement range

± 0.5 mm

± 1.0 mm

± 3.0 mm

± 15 mm

Linearity

± 0.91 µm ^*2

± 0.41 µm ^*2

± 0.72 µm ^*2

± 2.0 µm ^*2

± 4.65 µm ^*2

Resolution

0.25 µm^*3

Spot diameter

ø 750 µm

ø 300 µm

ø 500 µm

ø 600 µm

ø 1000 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 380 g

Optical unit

Approx. 1600 g

Model

CL-P007N^*1

CL-P015N^*1

CL-P030N^*1

CL-P070N^*1

CL-P150N^*1

Image

Type

Optical unit

Head

CL-P007 ^*1

CL-P015 ^*1

CL-P030 ^*1

CL-P070 ^*1

CL-P150 ^*1

Reference distance

7 mm

15 mm

30 mm

70 mm

150 mm

Reference measurement range

Measurement range

± 1.5 mm

± 1.3 mm

± 3.7 mm

± 10 mm

± 35 mm

Linearity

± 0.96 µm^*2

± 0.49 µm^*2

± 0.94 µm^*2

± 2.2 µm^*2

± 5.65 µm ^*2

High precision measurement range

Measurement range

± 0.5 mm

± 1.0 mm

± 3.0 mm

± 15 mm

Linearity

± 0.55 µm ^*2

± 0.41 µm ^*2

± 0.72 µm ^*2

± 2.0 µm ^*2

± 4.65 µm ^*2

Resolution

0.25 µm

Spot diameter

ø 50 µm

ø 25 µm

ø 38 µm

ø 50 µm

ø 75 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 380 g

Optical unit

Approx. 1600 g

Model

CL-S015G^*1

CL-V020G^*1

CL-V050G^*1

CL-PT010G^*1

Image

Type

Optical unit

Head

CL-S015 ^*1

CL-V020 ^*1

CL-V050 ^*1

CL-PT010 ^*1

Reference distance

15 mm

20 mm

50 mm

10 mm

Reference measurement range

Measurement range

± 1.0 mm

± 1.3 mm

± 4 mm

± 0.3 mm

Linearity

± 0.2 µm^*2

± 0.3 µm^*2

± 1.25 µm^*2

± 0.11 µm ^*2

High precision measurement range

Measurement range

− 0.2 mm/− 1.0 mm

± 0.5 mm

± 1.6 mm

± 0.15 mm

Linearity

± 0.1 µm ^*2

± 0.23 µm ^*2

± 1.15 µm ^*2

± 0.09 µm ^*2

Resolution

0.003 µm^*3

0.01 µm^*3

0.03 µm^*3

0.001 µm^*3

Spot diameter

ø 10 µm

ø 20 µm

ø 40 µm

ø 3.5 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP50

IP40 degassed structure for vacuum environments ^*5

IP64 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Operating ambient temperature

Head

− 20 to 70°C

− 20 to 200°C

0 to 50°C

Optical unit

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y,and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Vacuum

Vacuum environments

Ultra-high-vacuum environments ^*6

None

Explosion-proof rating

Explosion-proof performance

Head

None

Optical unit

Zone/Division

Head

Optical unit

Ambient temperature

Head

Optical unit

Certification number

Temperature characteristic

Head

0.005% of F.S. / °C ^*4

0.013% of F.S. / °C ^*4

0.015% of F.S. / °C ^*4

0.1% of F.S. / °C ^*4

Optical unit

0.015% of F.S. / °C

Material

Head

SUS303/304

SUS304

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 350 g

Approx. 100 g

Approx. 1100 g

Optical unit

Approx. 1600 g

Model

CL-S015N^*1

CL-V020N^*1

CL-V050N^*1

CL-PT010N^*1

Image

Type

Optical unit

Head

CL-S015 ^*1

CL-V020 ^*1

CL-V050 ^*1

CL-PT010 ^*1

Reference distance

15 mm

20 mm

50 mm

10 mm

Reference measurement range

Measurement range

± 1.0 mm

± 1.3 mm

± 4 mm

± 0.3 mm

Linearity

± 0.35 µm^*2

± 0.45 µm^*2

± 1.4 µm^*2

± 0.22 µm^*2

High precision measurement range

Measurement range

− 0.2 mm/− 1.0 mm

± 0.5 mm

± 1.6 mm

± 0.15 mm

Linearity

± 0.25 µm ^*2

± 0.38 µm ^*2

± 1.3 µm ^*2

± 0.2 µm ^*2

Resolution

0.25 µm^*3

Spot diameter

ø 10 µm

ø 20 µm

ø 40 µm

ø 3.5 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP50

IP40 degassed structure for vacuum environments ^*5

IP64 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Operating ambient temperature

Head

− 20 to 70°C

− 20 to 200°C

0 to 50°C

Optical unit

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Vacuum

Vacuum environments

Ultra-high-vacuum environments ^*6

None

Explosion-proof rating

Explosion-proof performance

Head

None

Optical unit

Zone/Division

Head

Optical unit

Ambient temperature

Head

Optical unit

Certification number

Temperature characteristic

Head

0.005% of F.S. / °C ^*4

0.013% of F.S. / °C ^*4

0.015% of F.S. / °C ^*4

0.1% of F.S. / °C ^*4

Optical unit

0.015% of F.S. / °C

Material

Head

SUS303/304

SUS304

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 350 g

Approx. 100 g

Approx. 1100 g

Optical unit

Approx. 1600 g